EUV lithography work has been published in APL | Laser produced high Field sciences (LF) Group
     

EUV lithography work has been published in APL | Laser produced high Field sciences (LF) Group

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2024.1.2

EUV lithography work has been published in APL

James’s paper on “Efficient photo-dissociation-induced production of hydrogen radicals using vacuum ultraviolet light from a laser-produced plasma” has been published in Applied Physics Letters. We proposed and demonstrated a new scheme to produce hydrogen radicals more efficiently compared to the conventional ones.

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