2024.4.10

Tanaka-san’s paper published in Applied Physics Letters

Tanaka-san’s paper has been published in Applied Physics Letters.
Extreme ultraviolet (EUV) is a pivotal light in the manufacture of cutting-edge smart devices that are on your hands and desks. Our team is working to reduce the cost of such devices’ manufacturing.
This paper highlighted the absolute density of hydrogen radicals produced by the interaction between hydrogen gas and EUV with the laser-induced fluorescence technique. The hydrogen radicals are expected to remove contamination in the manufacturing system utilizing EUV. For more details, please visit the publication on AIP’s website​.